Ku-semiconductor Facrication, amagesi enza wonke umsebenzi nama-lasers athola ukunakwa konke. Ngenkathi ama-lasers enza amaphethini we-etch transistor eSilicon, i-etch eqala ukufaka i-silico futhi yephula i-laser ukwenza amasekethe aphelele uchungechunge lwamagesi. Akumangazi ukuthi la magesi, asetshenziselwa ukuthuthukisa ama-microprocessors ngokusebenzisa inqubo esezingeni eliphakeme, ahlanzeka kakhulu. Ngaphezu kwalo mkhawulo, abaningi babo banokunye ukukhathazeka nokulinganiselwa. Amanye amagesi yi-crynicic, amanye ayawonaka, futhi amanye anobuthi kakhulu.
Konke kukho konke, lokhu kulinganiselwa kwenza ukukhiqiza ama-gesi ukusabalalisa amasimu emboni ye-semiconductor kuyinselelo enkulu. Ukucaciswa kwezinto ezibonakalayo kuyadingeka. Ngaphezu kokucaciswa kwezinto ezibonakalayo, uhlu lokusatshalaliswa kwegesi luhlu lwama-elekhronikhi oluyinkimbinkimbi yezinhlelo ezixhunyiwe. Izindawo lapho zihlanganiswa khona ziyinkimbinkimbi futhi zigcwele. Ukuqanjwa kokugcina kwenzeka esizeni njengengxenye yenqubo yokufaka. I-Orbital Welding isiza ukuhlangabezana nezidingo eziphezulu zokusabalalisa igesi ngenkathi yenza ubuciko ezindaweni eziqinile nezinselele zilawuleke kakhudlwana.
Kusetshenziswa kanjani amagesi embonini ye-semiconductor
Ngaphambi kokuzama ukuhlela ukwenziwa kohlelo lokusabalalisa igesi, kuyadingeka ukuqonda okungenani izisekelo zokukhiqiza i-semiconductor. Emgogodleni wayo, abasebenza ngo-semiconductors basebenzisa amagesi ukufaka ama-solids aseduze aseduze nendawo ngendlela elawulwa kakhulu. Lawa ma-solids afakiwe abese eguqulwa ngokwazisa amanye amagesi, ama-lasers, amakhemikhali amakhemikhali, nokushisa. Izinyathelo ezisezinhlelweni ezibanzi yilezi:
Ukubekwa: Le yinqubo yokwakha i-silicon wafer yokuqala. Amagesi e-Silicon Presursor amagebhe afakwa egumbini lokufaka i-vacuum futhi akha ama-silicon ama-silicon ama-silicon ngokusebenzisa ukusebenzisana kwamakhemikhali noma ngokomzimba.
I-Photolithography: Isigaba sezithombe sibhekisa kuma-lasers. E-Ultraviolet Lithography ephakeme kakhulu (EUV) i-spectrum esetshenziselwa ukwenza ama-chips aphezulu kakhulu, i-laser yekhabhoni ye-carbon dioxide isetshenziselwa i-microprocessor circe in the wafer.
Etching: Ngesikhathi senqubo ye-etching, i-halogen-carbon igesi ye-carbon ifakwe egumbini ukuze lisebenze futhi lincibilike izinto ezikhethiwe ku-silicon substrate. Le nqubo ifaka ngempumelelo umjikelezo we-laser ophrintiwe engxenyeni engezansi.
Ukuhlaziya: Lesi yisinyathelo esengeziwe esiguqula ukuthuthuka kwendawo engenele ukuthola izimo eziqondile lapho i-semiconductor iqhuba khona.
Ukuncishiswa: Kule nqubo, ukusabela phakathi kwezingqimba ze-wafer kubangelwa ingcindezi ephakeme kanye nokushisa. Empeleni, iphothula imiphumela yenqubo yangaphambilini futhi yakha iprosesa ephothuliwe ku-wafer.
IChamber and Line Cleaning: Amagesi asetshenziswa ezinyathelweni ezedlule, ikakhulukazi i-Etching ne-DoPing, zivame ukuba yingozi futhi zisebenzayo. Ngakho-ke, igumbi lenqubo kanye nemigqa yegesi elikondlayo kudinga ukugcwaliswa ngamagesi wokungathathi hlangothi ukunciphisa noma ukuqeda ukusabela okulimazayo, bese kugcwala amagesi we-inert ukuvimba noma yimaphi amagesi angcolisiwe endaweni yangaphandle.
Izinhlelo zokusabalalisa igesi embonini ye-semiconductor zivame ukuba yinkimbinkimbi ngenxa yamagesi amaningi ahlukene abandakanyekayo nokulawulwa okuqinile kokugeleza kwegesi, izinga lokushisa kanye nengcindezi okufanele kugcinwe ngokuhamba kwesikhathi. Lokhu kubuye kube nzima nzima ngokumsulwa okuphezulu okudingekayo egesi ngayinye kwinqubo. Amagesi asetshenziswa esigabeni esedlule kufanele ashiswe emigqeni nasemakamelweni noma ahlukaniswe ngenye indlela ngaphambi kokuqala kwesinyathelo esilandelayo senqubo. Lokhu kusho ukuthi kunenombolo enkulu yemigqa ekhethekile, phakathi kwama-welded tube system nama-hoses, phakathi kwama-hoses kanye nama-tubor kanye nezinhlelo zokubopha zenzelwe ukuvikela ukungcoliswa kwepayipi kwemvelo yemvelo yokutholwa.
Ngaphezu kwalokho, ingaphandle le-Cleanroom kanye namagesi akhethekile azohlonyiswa izinhlelo zokuhlinzekwa kwegesi ngobuningi ezindaweni ezihlangenwe nakho nezindawo ezikhethekile ezivalekile ukunciphisa noma yiziphi izingozi emcimbini wokuvuza ngengozi. I-Welding Lezi zinhlelo zegesi endaweni eyinkimbinkimbi ayiwona umsebenzi olula. Kodwa-ke, ngokunakekela, ukunaka imininingwane kanye nemishini efanele, lo msebenzi ungafezeka ngempumelelo.
Ukukhiqiza amasistimu wokusabalalisa egesi embonini ye-semiconductor
Izinto ezisetshenziswa ezinhlelweni zokusabalalisa igesi ze-semiconductor zihluka kakhulu. Bangafaka izinto ezifana namapayipi e-PTFE-lined zensimbi nama-hoses ukumelana namagesi awonakalise kakhulu. Izinto ezivame kakhulu ezisetshenziselwa amapayipi ajwayelekile embonini ye-semiconductor ziyinsimbi engama-316l - i-carbon ephansi yensimbi engenacala. Uma kukhulunywa ngo-316L versus 316, 316l imelana kakhulu nokugqwala komoya. Lokhu kucatshangelwa okubalulekile lapho ubhekene nebanga lamagesi asebenzayo asebenzayo futhi angahle angakhulisa ikhabhoni. I-Welding 316l insimbi engagqwali ikhishwa kancane kwekhabhoni. Kubuye kunciphise amandla okuguguleka kokusanhlamvu, okungaholela ekugcekeni okuphaphayo kuma-welds kanye nokushisa kwathinteka izindawo.
Ukunciphisa amathuba okugqwayiza amapayipi okuholela ekugcekeni komugqa womkhiqizo kanye nokungcola, insimbi engenacala engama-316l ishiswe nge-Argon evikelekile evikela igesi kanye nojantshi we-tungsten gas wavikelwa imboni embonini ye-semiconductor. Ukuphela kwenqubo ye-welding enikeza ukulawulwa okudingekayo ukuze kugcinwe imvelo ebuhlungu ecubungula amapayipi. I-Welding ezenzakalelayo ye-Orbital Orrital ihlinzeka kuphela inqubo ephindaphindekayo edingekayo ukuqeda i-Weld ekwakhekeni kwezinhlelo ze-semiconductor. Iqiniso lokuthi amakhanda ahlanganisiwe we-orbital weld angahlalisa izikhala ezigcwele futhi ezinzima emihlanganweni eyinkimbinkimbi phakathi kwezindawo zenqubo kuyindlela ebalulekile yenqubo.
I-Shenzhen Wofei Technology Co, Ltd, eneminyaka engaphezu kwengu-10 yesipiliyoni ekuhlinzekweni kwamagesi wezimboni kanye namagesi akhethekile, izinto zokwenza izinto kanye nezobunjiniyela begesi, singakwazi ukukunikeza izinto ezidingekayo ukuletha imikhiqizo yakho phambili embonini. Asikwazi ukunikela kuphela ngama-valves ahlukahlukene kanye nokufakwa kwamagesi akhethekile we-elekresi, kepha futhi aklama amapayipi egesi kanye nokufakwa kwamathuluzi kumakhasimende ethu.
Isikhathi Sokuposa: Jul-31-2023