Ubuchwepheshe bamapayipi egesi obuhlanzekile buyingxenye ebalulekile yesistimu yokuhlinzeka ngegesi ehlanzekile, okuwubuchwepheshe obuyinhloko bokuletha igesi ehlanzekile edingekayo kuze kube seqophelweni lokusetshenziswa futhi namanje igcine ikhwalithi efanelekayo;Ubuchwepheshe bamapayipi egesi obuhlanzekile buhlanganisa ukuklama okulungile kwesistimu, ukukhethwa kwezinto zokufakwa kanye nezinsiza, ukwakhiwa nokufakwa, nokuhlola.Eminyakeni yamuva, izidingo eziqinile eziqinile mayelana nokuhlanzeka nokuqukethwe kokungcola kwamagesi ahlanzekile kakhulu ekukhiqizeni imikhiqizo ye-microelectronics emelwe yizifunda ezinkulu ezihlanganisiwe zenze ubuchwepheshe bokubhobhoza kwamagesi ahlanzekile kakhulu bukhathazeke kakhulu futhi bugcizelelwe.Okulandelayo ukubuka okufushane kwamapayipi egesi ahlanzekile kusukela ekukhethweni kwezinto ezibonakalayoof ukwakhiwa, kanye nokwamukelwa kanye nokuphathwa kwansuku zonke.
Izinhlobo zamagesi avamile
Ukuhlukaniswa kwamagesi ajwayelekile embonini ye-elekthronikhi:
Amagesi avamile(Igesi eyinqwaba）I-hydrogen (H2), i-nitrogen (N2, umoya-mpilo (O2), i-argon (A2), njll.
Amagesi akhethekilenguSiH4 ,PH3 ,B2H6 ,A8H3 ,CL ,HCL,CF4 ,NH3,I-POCL3, I-SIH2CL2 I-SIHCL3,NH3, BCL3 ,I-SIF4 ,I-CLF3 ,CO,C2F6, N2O,F2,HF,I-HBR SF6…… njll.
Izinhlobo zamagesi akhethekile ngokuvamile zingahlukaniswa njengezidlayoigesi, ezinobuthiigesi, ezivuthayoigesi, ezivuthayoigesi, ineziigesi, njll. Amagesi e-semiconductor avame ukusetshenziswa ngokuvamile ahlukaniswa ngale ndlela elandelayo.
(i) Iyagqwala / inobuthiigesi: HCl , BF3, WF6, HBr , SiH2Cl2, NH3, PH3, Cl2, BCl3…njll.
(ii) Ukuvuthaigesi: H2, CH4, SiH4, PH3, ASH3, SiH2Cl2, B2H6, CH2F2,CH3F, CO...njll.
(iii) ukuvuthaigesi:O2, Cl2, N2O, NF3… njll.
(iv) Ongenasiciigesi:N2, CF4, C2F6, C4F8,SF6, CO2, Ne, Kr, He...njll.
Amagesi amaningi e-semiconductor ayingozi emzimbeni womuntu.Ikakhulukazi, amanye ala magesi, njenge-SiH4 ukuvutha okuzenzakalelayo, inqobo nje uma ukuvuza kuzosabela ngobudlova nomoya-mpilo osemoyeni futhi kuqale ukushisa;kanye ne-Ash3kunobuthi obukhulu, noma yikuphi ukuvuza okuncane kungase kubangele ingozi yokuphila komuntu, kungenxa yalezi zingozi ezisobala, ngakho-ke izidingo zokuphepha komklamo wesistimu ziphezulu kakhulu.
Ububanzi bokusebenza kwamagesi
Njengezinto ezibalulekile eziyisisekelo zokusetshenziswa kwemboni yesimanje, imikhiqizo yegesi isetshenziswa kabanzi, futhi inani elikhulu lamagesi ajwayelekile noma amagesi akhethekile asetshenziswa kwensimbi, insimbi, i-petroleum, imboni yamakhemikhali, imishini, i-electronics, ingilazi, izitsha zobumba, izinto zokwakha, ukwakhiwa. , imikhakha yokucubungula ukudla, imithi kanye nezokwelapha.Ukusetshenziswa kwegesi kunomthelela obalulekile kubuchwepheshe obuphezulu balezi zindawo ikakhulukazi, futhi iyigesi yayo yezinto ezingavuthiwe noma igesi yenqubo.Kuphela ngezidingo kanye nokukhuthazwa kwemikhakha emisha yezimboni nesayensi nobuchwepheshe besimanje, imikhiqizo yemboni yegesi ingathuthukiswa ngokwedlulele ngokwehlukahlukana, ikhwalithi kanye nobuningi.
Ukusetshenziswa kwegesi embonini ye-microelectronics kanye ne-semiconductor
Ukusetshenziswa kwegesi bekulokhu kudlala indima ebalulekile enqubweni ye-semiconductor, ikakhulukazi inqubo ye-semiconductor isetshenziswe kabanzi ezimbonini ezihlukahlukene, kusukela ku-ULSI yendabuko, i-TFT-LCD kuya embonini yamanje ye-micro-electro-mechanical (MEMS), konke ezisebenzisa inqubo ebizwa nge-semiconductor njengenqubo yokukhiqiza imikhiqizo.Ukuhlanzeka kwegesi kunomthelela omkhulu ekusebenzeni kwezingxenye kanye nemikhiqizo yomkhiqizo, futhi ukuphepha kokunikezwa kwegesi kuhlobene nempilo yabasebenzi kanye nokuphepha kokusebenza kwezitshalo.
Ukubaluleka kokuhlanzeka kwamapayipi ekuthuthweni kwegesi okuhlanzeke kakhulu
Enqubweni yokuncibilika kwensimbi engagqwali nokwenza izinto, cishe u-200g wegesi ungamuncwa ngethani ngalinye.Ngemva kokucutshungulwa kwensimbi engagqwali, hhayi nje ubuso bayo obunamathele obunokungcola okuhlukahlukene, kodwa futhi ku-lattice yayo yensimbi futhi yamunca inani elithile legesi.Uma kukhona ukugeleza komoya epayipini, insimbi imunca le ngxenye yegesi izophinde ingene ekugelezeni komoya, ingcolise igesi emsulwa.Lapho ukugeleza komoya eshubhuni kungaqhubeki ukugeleza, ishubhu likhanga igesi ngaphansi kwengcindezi, futhi lapho ukugeleza komoya kuyeka ukudlula, igesi ekhangiswa yishubhu yenza ukwehla kokucindezela ukuze kuxazululwe, futhi igesi exazululiwe nayo ingena kugesi ehlanzekile eshubhu. njengokungcola.Ngesikhathi esifanayo, i-adsorption kanye nesinqumo kuyaphindwa, ukuze insimbi engaphakathi kwepayipi iphinde ikhiqize inani elithile lempushana, futhi lezi zinhlayiya zothuli lwensimbi ziphinde zingcolise igesi ehlanzekile ngaphakathi kwepayipi.Lesi sici se-tube sibalulekile ukuze kuqinisekiswe ukuhlanzeka kwegesi ethuthwayo, okungadingi nje kuphela ukushelela okuphezulu kakhulu kwendawo yangaphakathi ye-tube, kodwa futhi ukumelana nokugqoka okuphezulu.
Lapho kusetshenziswa igesi enamandla okugqwala, amapayipi ensimbi engagqwali angagqwali kufanele asetshenziselwe ukubhoboza.Uma kungenjalo, ipayipi lizokhiqiza izindawo zokugqwala endaweni engaphakathi ngenxa yokugqwala, futhi ezimweni ezimbi kakhulu, kuzoba nendawo enkulu yokuhlubula insimbi noma ukubhoboza, okuzongcolisa igesi ehlanzekile ezosatshalaliswa.
Ukuxhumeka kwamapayipi okuhamba kwegesi okuhlanzeka okuphezulu nokuhlanzeka okuphezulu kanye nokusabalalisa kwamazinga amakhulu okugeleza.
Ngokomthetho, zonke zihlanganisiwe, futhi amashubhu asetshenzisiwe adingeka ukuthi angabi nanguquko ekuhleleni lapho kufakwa i-welding.Izinto ezinokuqukethwe kwekhabhoni ephezulu kakhulu zingaphansi kokungena komoya kwezingxenye ezishiselwe lapho zishiswa, okwenza ukungena phakathi kwamagesi ngaphakathi nangaphandle kwepayipi kucekele phansi ubumsulwa, ukoma nokuhlanzeka kwegesi elidluliselwayo, okuholela ekulahlekelweni kwegesi. yonke imizamo yethu.
Kafushane, igesi elihlanzekile kanye nepayipi elikhethekile lokudlulisela igesi, kuyadingeka ukusebenzisa ukwelashwa okukhethekile kwepayipi lensimbi engenasici, ukwenza uhlelo lwamapayipi ahlanzekile (okuhlanganisa amapayipi, okokufakwa, ama-valve, i-VMB, i-VMP) ukusatshalaliswa kwegesi ehlanzekile kunomsebenzi obalulekile.
Umqondo ojwayelekile wobuchwepheshe obuhlanzekile bokudlulisa nokusabalalisa amapayipi
Ukudluliswa kwegesi emsulwa kakhulu futhi ehlanzekile ngamapayipi kusho ukuthi kunezidingo ezithile noma izilawuli zezingxenye ezintathu zegesi okufanele zithuthwe.
Ukuhlanzeka kwegesi: Okuqukethwe komoya wokungcola ekuhlanzekeni kwe-gGas: Okuqukethwe komoya wokungcola kugesi, ngokuvamile kuvezwa njengephesenti lokuhlanzeka kwegesi, okufana no-99.9999%, nakho kuvezwa njengesilinganiso sevolumu yokuqukethwe komkhathi wokungcola ppm, ppb, ppt.
Ukoma: inani lomkhondo womswakamo kugesi, noma inani elibizwa ngokuthi ubumanzi, ngokuvamile elivezwa ngokwezinga lamazolo, njengendawo yokucindezela komkhathi -70.C.
Ukuhlanzeka: inani lezinhlayiya ezingcolisayo eziqukethwe kugesi, usayizi wezinhlayiyana ongu-µm, zingaki izinhlayiya/M3 okufanele ziveze, zomoya ocindezelwe, ngokuvamile ovezwa ngokuya ngokuthi mangaki ama-mg/m3 wezinsalela eziqinile ezingagwemeki, ezihlanganisa okuqukethwe kukawoyela. .
Ukuhlukaniswa kosayizi ongcolile: izinhlayiya ezingcolisayo, ikakhulukazi zibhekisela ekukhunjweni kwamapayipi, ukuguga, ukugqwala okukhiqizwa yizinhlayiya zensimbi, izinhlayiya zensiye yomoya, kanye nama-microorganisms, ama-phages namaconsi egesi aqukethe umswakama, njll., ngokosayizi wezinhlayiya zawo. ihlukaniswe yaba
a) Izinhlayiya ezinkulu – usayizi wezinhlayiyana ezingaphezu kuka-5μm
b) I-particle - ububanzi bempahla phakathi kuka-0.1μm-5μm
c) Izinhlayiya ze-Ultra-micro - usayizi wezinhlayiyana ngaphansi kuka-0.1μm.
Ukuze kuthuthukiswe ukusetshenziswa kwalobu buchwepheshe, ukuze ukwazi ukuqonda ukuqonda usayizi wezinhlayiyana namayunithi we-μm, isethi yesimo sezinhlayiyana ezithile inikezwa ukuze kusetshenziswe ireferensi.
Okulandelayo ukuqhathanisa izinhlayiya ezithile
| Igama /usayizi wezinhlayiya (µm) | Igama /usayizi wezinhlayiya (µm) | Igama/ Usayizi wezinhlayiyana (µm) |
| Igciwane 0.003-0.0 | I-aerosol 0.03-1 | I-Aerosolized microdroplet 1-12 |
| I-nuclear fuel 0.01-0.1 | Upende 0.1-6 | Fly umlotha 1-200 |
| Ikhabhoni emnyama 0.01-0.3 | Impushana yobisi 0.1-10 | Isibulala-zinambuzane 5-10 |
| I-Resin 0.01-1 | Amagciwane 0.3-30 | Uthuli lukasimende 5-100 |
| Intuthu kagwayi 0.01-1 | Uthuli lwesihlabathi 0.5-5 | Impova 10-15 |
| I-Silicone 0.02-0.1 | Isibulala-zinambuzane 0.5-10 | Izinwele zomuntu 50-120 |
| Usawoti ocwebezelayo 0.03-0.5 | Uthuli lwesulfure olugxilile 1-11 | Isihlabathi solwandle 100-1200 |
Isikhathi sokuthumela: Jun-14-2022