Sisiza umhlaba ukuthi ukhula kusukela ngo-1983

Izisombululo zobuchwepheshe zezinhlelo zokuhlinzekwa ngegesi eziphakeme kakhulu ngezinqubo ze-semiconductor

Ubuchwepheshe be-purity perity Piping Technology kuyingxenye ebalulekile yohlelo lokuhlinzekelwa kwegesi oluhlanzekile kakhulu, okungubuchwepheshe obalulekile ukuletha igesi edingekayo edingekayo ephuze eliphakemeyo lisendaweni yokusebenzisa futhi namanje kugcina ikhwalithi efanelekile; Ubuchwepheshe be-purity turnity piping technology kufaka phakathi ukwakhiwa okulungile kohlelo, ukukhethwa kwezithako nezinye izinsimbi, ukwakhiwa nokufakwa, nokuhlola. Eminyakeni yamuva nje, izidingo eziqinile ngokuqukethwe kokuhlanzeka nokungcola kwamagesi ahlanzekile aphezulu ekukhiqizeni imithombo yeMicroelectorics emelelwa ubuchwepheshe obuhlangene obukhulu baye benziwa futhi bagcizelelwe. Okulandelayo ukubuka okufushane kwepayipi elihlanzekile eliphakeme ekukhetheni kwezinto ezibonakalayoof Ukwakha, kanye nokwamukelwa kanye nokuphathwa kwansuku zonke.

Izinhlobo zamagesi ajwayelekile

Ukuhlukaniswa kwamagesi ajwayelekile embonini ye-elekthronikhi:

Amagesi ajwayelekile(Igesi eningiIsihlehlukene: hydrogen (h2), i-nitrogen (n2), umoya-mpilo (o2), i-argon (a2), njll.

Amagesi akhethekilezih4 ,PH3 ,B2H6 ,A8H3 ,CL ,Hllo,CF4 ,NH3,I-PoCL3, Sih2cl2 Siecl33,NH3,  I-bcl3 ,Sifa4 ,Okokufakela3 ,Ukukhanywa,C2F6, N2o,F2,Hf,Hbr sf6...... njll.

Izinhlobo zamagesi akhethekile zivame ukuhlukaniswa njengokuqinaigesi, ubuthiigesi, ukuvutha okuvuthayoigesi, okuhlanzekileigesi, inertigesi, njll. Amagesi asetshenziswa kakhulu ama-semiconductor ngokuvamile ahlukaniswa ngokulandelayo.

(i) I-Complocinage / iToccicigesi: Hcl, bf3, Wf6, Hbr, sih2Cl2, NH3, Ph3, Cl2, BCL3... njll.

(ii) Ukuvuthaigesi: H2, Ch4, Sih4, Ph3, Ash3, sih2Cl2, B2H6, CH2F2,CH3F, co ... njll.

(iii) Ukuhlaziywaigesi: O2, Cl2, N2O, nf3... njll.

(iv) inertigesi: N2, Cf4, C2F6, C4F8,Isitho6, Co2, NE, KR, yena ... njll.

Amagesi amaningi we-semiconductor ayingozi emzimbeni womuntu. Ikakhulu, amanye ala magesi, anjengo-sih4 Ukuvutha okuzenzakalelayo, inqobo nje uma ukuvuza kuzosabela ngobudlova ngomoya-mpilo emoyeni bese uqala ukushisa; nomlotha3Ubuthi obunobuthi kakhulu, noma yikuphi ukuvuvukala okuncane kungadala ingozi yokuphila komuntu, kungenxa yalezi zingozi ezisobala, ngakho-ke izidingo zokuphepha zokwakhiwa kohlelo ziphezulu kakhulu.

Ububanzi besicelo samagesi  

Njengokusetshenziswa okubalulekile okuyisisekelo kwemboni yesimanje, imikhiqizo yegesi isetshenziswa kabanzi, futhi inani elikhulu lamagesi ajwayelekile noma amagesi akhethekile asetshenziswa ku-metallurgy, i-specile, i-elektroni, ingilazi, ukucubungula ukudla, imikhakha yezokwelapha kanye nemithi yezokwelapha kanye nemithi yezokwelapha. Ukusetshenziswa kwegesi kunomthelela obalulekile kubuchwepheshe obuphezulu balezi zinkundla ikakhulukazi, futhi kuyinto yayo ebaluleke kakhulu ebonakalayo eluhlaza noma igesi yenqubo. Kunezidingo kuphela kanye nokukhuthaza imikhakha ehlukahlukene yezimboni kanye nesayensi yanamuhla kanye nobuchwepheshe, imikhiqizo yezimboni yegesi ingathuthukiswa ngokuxhuma kanye nemingcele ngokuya ngezinhlobonhlobo, ikhwalithi nenani.

Isicelo segesi ku-microelectonline embonini ye-semiconductor

Ukusetshenziswa kukagesi bekulokhu kudlala indima ebalulekile kwinqubo ye-semiconductor, ikakhulukazi inqubo ye-semiconductor isetshenziswe kabanzi emikhakheni ehlukahlukene, kusuka embonini yendabuko, i-TFT-LCD kwinqubo ebizwa ngokuthi yi-semiconductor inqubo njengenqubo yokukhiqiza yemikhiqizo. Ubumsulwa begesi bunomthelela onqumayo ekusebenzeni kwezakhi kanye nezithelo zomkhiqizo, kanye nokuphepha kokuhlinzekwa kwegesi kuhlobene nempilo yabasebenzi kanye nokuphepha kokusebenza kwezitshalo.

Ukubaluleka kwamapayipi ahlanzekile aphezulu eTaplonative Perinety pures Transport

Enqubweni yokuncibilika kwensimbi engagqwali nokwenza izinto, cishe ngo-200g wegesi kungadonswa ngethani ngalinye. Ngemuva kokucutshungulwa kwensimbi engenasici, hhayi kuphela indawo yaso egcwele ukungcola okuhlukahlukene, kodwa futhi nasemathatini alo wensimbi futhi amunca inani elithile legesi. Lapho kunamapayipi ngepayipi, insimbi ithatha le ngxenye yegesi izongena futhi i-airflow, ingcolise igesi emsulwa. Lapho i-airflow ku-tube igeleze ye-decinewiusuous, ama-adese ama-adedes egesi ngaphansi kwengcindezi, futhi lapho i-airflow iyeka ukudlula, igesi ekhishwe yi-tube yakha ukucindezela, futhi igesi exazululiwe futhi ingena ephepheni elihlanzekile kwi-tube. Ngasikhathi sinye, i-adsorption kanye nokuxazululwa kabusha kuyaphindwa, ukuze insimbi engaphakathi yeshubhu futhi ikhiqiza inani elithile le-powder, futhi izinhlayiya zothuli zensimbi nazo zingcolisa igesi emsulwa ngaphakathi kweshubhu. Lesi sici seshubhu sibalulekile ukuze siqinisekise ubumsulwa begesi yokuthuthwa, obudinga ukuthi bushelelezi obukhulu kakhulu bendawo yangaphakathi yeshubhu, kodwa futhi nokuphikiswa okuphezulu.

Lapho igesi enokusebenza okuqinile okuwonakalisayo isetshenziswa, amapayipi ensimbi angenamikhawulo angavikeleki kufanele asetshenziselwe amapayipi. Ngaphandle kwalokho, ipayipi lizokhiqiza izindawo zokugqwala endaweni yangaphakathi ngenxa yokugqwala, futhi ezimweni ezinkulu, kuzoba yi-versoration pures pures ukuthi isatshalaliswe.

Ukuxhumeka kobumsulwa obuphezulu nokuhlanzeka okuphezulu kokuhlanzeka kwegesi kanye nokusabalalisa kwamapayipi amakhulu okugeleza.

Ngokuyinhloko, bonke bashiswe, futhi amashubhu asetshenzisiwe ayadingeka ukuthi angangeni shintsho enhlanganweni lapho kusetshenziswa i-welding. Izinto ezinokuqukethwe okuphezulu kakhulu kwekhabhoni zingaphansi komoya wezingxenye ze-welded lapho i-welding, eyenza ukungena kwamagesi ngaphakathi nangaphandle kwepayipi futhi kubhubhise ubumsulwa begesi, okuholela ekulahlekelweni yimizamo yethu yonke.

Ngamafuphi, ngegesi ehlanzekile ebumsulwa kanye nepayipi elikhethekile lokuhambisa igesi, kuyadingeka ukusebenzisa ukwelashwa okukhethekile kwepayipi lensimbi elingenacala, ukwenza amapayipi ahlanzekile epayipini (kufaka phakathi amapayipi, i-VMB, i-VMP) ekusatshalalisweni okuphezulu.

Umqondo ojwayelekile wobuchwepheshe obuhlanzekile bokuhambisa kanye namapayipi okusabalalisa

Ukuhanjiswa komzimba okuhlanzekile okuhlanzekile futhi okuhlanzekile nge-piping kusho ukuthi kunezidingo ezithile noma izilawuli zezici ezintathu zegesi okufanele zihanjiswe.

Ukumsulwa kwegesi: Okuqukethwe yindawo yokungcola emhlazweni we-GGAS: Okuqukethwe komoya wokungcola kugesi, okuvame ukuvezwa njengephesenti lokuhlanzeka kwegesi, okufana nokulinganiswa kwevolumu ye-Imputer Atmosphere yokuqukethwe ye-PPM, PPB, PPT.

Ukoma: Inani lokulandela umswakama kugesi, noma inani elibizwa ngokuthi amanzi, elivame ukuvezwa ngokuya nge-Dew Point, njenge-Atmospheric Pressure Dew Point -70. C.

Ukuhlanzeka: Inani lezinhlayiya eziphikisana negesi, ubukhulu bezinhlayiyana ze-μm, zingaki izinhlayiya / m3 ukuveza, ngokuvamile futhi kuvezwa ngemibandela yokuthi izinsalela eziqinile ezingenakuphikwa, ezimboza okuqukethwe kawoyela.

Ukuhlukaniswa kosayizi okungcolisa: izinhlayiya ezingcolisayo, ikakhulukazi kubhekisa ekuhlanzeni kwamapayipi, ukugqoka, ukugqwala okwenziwe yizinhlayiya zensimbi, izinhlayiya ze-armospheric, kanye nama-microorganisms, njll kanye nosayizi wosayizi wayo wezinhlayiyana kuhlukaniswe

a) Izinhlayiya ezinkulu - usayizi wezinhlayiyana ngenhla 5μm

b) Izinhlayiyana - Ububanzi bezinto ezibonakalayo phakathi kuka-0.1μm-5μm

c) Izinhlayiya ze-Ultra-Micro - usayizi wezinhlayiyana ezingaphansi kwe-0.1μM.

Ukuze uthuthukise ukusetshenziswa kwalobu buchwepheshe, ukuze ukwazi ukuqonda ukuqonda kwama-usayizi wezinhlayiyana namayunithi we-μm, iqoqo lesimo esithile sezinhlayiya linikezwe ireferensi

Okulandelayo ukuqhathanisa izinhlayiya ezithile

Igama / Ubukhulu bezinhlayiya (μm)

Igama / Ubukhulu bezinhlayiya (μm) Igama / Ubukhulu bezinhlayiya (μm)
Virus 0.003-0.0 Aerosol 0.03-1 I-aerosolised microdroplet 1-12
Fuel Beclear 0.01-0.1 Upende 0.1-6 Fly Ash 1-200
I-Carbon Black 0.01-0.3 Ubisi lwe-Powder 0.1-10 Pesticide 5-10
Resin 0.01-1 Bacteria 0.3-30 Uthuli lukasimende 5-100
Intuthu kagwayi 0.01-1 Uthuli lwesihlabathi 0.5-5 Impova 10-15
Abicah 0.02-0.1 Pesticide 0.5-10 Izinwele Zomuntu 50-120
Usawoti olwenziwe nge-crystallized 0.03-0.5 Uthuli lwe-sulfur oluhlanganisiwe 1-11 Isihlabathi solwandle 100-1200

Isikhathi sePosi: Jun-14-2022