Njengoba imakethe ye-semiconductor ikhula, izindinganiso zobumsulwa nokunemba zikhula ngokwengeziwe. Enye yezinto ezinqumayo kwikhwalithi yokukhiqiza i-semiconductor amagesi asetshenziswa kwinqubo. Lawa magesi adlala izindima eziningi kwinqubo yokukhiqiza, kufaka phakathi:
Ukulawulwa kwenqubo yokunemba
Ukuvimbela Ukungcola
Ukuthuthukiswa Kwempahla Ye-Metallurgical
Ukwenza lezi zindima ngempumelelo, ukuhlinzekwa kwegesi kanye nohlelo lokusabalalisa kumele lusebenze kahle. Idizayini yezinhlelo zokuphatha igesi ezisetshenziselwa ukukhiqiza i-semiconductor kumele zisekelwe yizinto eziqinile nemihlangano eyenziwe ngezifiso ukuqinisekisa ukukhiqizwa kwekhwalithi ephezulu kakhulu nekhwalithi ephezulu ye-semiconductor.
Amagesi asetshenziswa ekukhiqizweni kwe-semiconductor
Inqubo yokukhiqiza i-semiconductors idinga ukusetshenziswa kwamagesi ahlukene ngezigaba ezahlukahlukene zenqubo.
Ngenkathi amagesi ajwayelekile afana ne-nitrogen, i-hydrogen, i-argon kanye ne-helium angasetshenziswa ngendlela yawo ehlanzekile, izinqubo ezithile zingadinga izingxube ezikhethekile. Silinanes noma i-siloxanes, ama-hexafluorides, ama-halides kanye ne-hydrocarbons amagesi ambalwa asetshenziswa e-semiconductor ekhiqizwayo. Amaningi ala magesi angaba yingozi noma asebenze kahle, adala izinselelo ekukhethweni nasekwakhiweni kwezakhi zezinhlelo zegesi.
Nazi ezinye izibonelo:
\ Hydrogen kanye ne-helium kungavuza kalula kusuka kumapayipi nezinhlelo ezifanele ngenxa yosayizi wazo omncane we-athomu nesisindo.
\ Sililanes zivutha kakhulu futhi ingazihlanganisa ngokuzenzakalelayo (okuzenzakalelayo) emoyeni.
\ Nitrogen difluoride esetshenzisiwe kwisikhungo, e-etching kanye nezigaba zokuhlanza kweChamber ziba ngugesi onamandla wokuvikela ukushisa lapho evuthwa emvelweni.
\ Hydrogen fluoride (i-etching gesi) isebenza kakhulu kumapayipi ensimbi.
\ Trimethylgallium ne-ammonia kungaba nzima ukuphatha - ukuguquguquka okuncane kokushisa kwabo kwezidingo zokushisa nezidingo zokucindezela kungathinta inqubo yokubekwa.
Ukulawula Izimo Zenqubo Ukunciphisa imiphumela emibi yalawa magesi kumele kube okubaluleke kakhulu ngesikhathi sedizayini yohlelo. Kubalulekile ngokulinganayo ukusebenzisa izingxenye ezisezingeni eliphakeme kakhulu ezifana nama-afk diaphragm valves ngesikhathi sokwakha.
Ukubhekana nezinselelo zokwakheka kohlelo
Amagesi we-semiconderture gradlar grade asezimweni eziningi zobumsulwa obuphezulu futhi ahlinzeke ngemibandela yokuhlanzeka noma athuthukise ukusabela ngezigaba ezahlukahlukene zenqubo yokukhiqiza, efana namagesi we-ETCH kanye nama-etch kanye namagesi wokugcina. Ukuvuza noma ukungcoliswa kwamagesi anjalo kungaba nemiphumela emibi. Ngakho-ke, kubalulekile ukuthi izingxenye zohlelo zisetshenziselwe ukumelana nokubekwa uphawu nokugqwala kanye nokuqedwa kwendawo ebushelelezi (i-electrolytic polishing) ukuqinisekisa ukuthi akunakungcola futhi kunezinga eliphakeme kakhulu lokuhlanzeka kungagcinwa.
Ngaphezu kwalokho, amanye ala magesi angashisa noma apholiswe ukuze azuze izimo zenqubo ezifiselekayo. Izakhi ezifakwe kahle kahle ziqinisekisa ukulawulwa kwezinga lokushisa, okubalulekile ukusebenza kahle komkhiqizo wokugcina.
Ukusuka emthonjeni ongena endaweni yokusebenzisa, ukwahlukana okubanzi kwe-AFK kusekelwa ubumsulwa obuphezulu, izinga lokushisa, ingcindezi nokulawula ukuphuma okudingekayo kumagumbi okuhlanza ama-semiconductor namagumbi we-vacuum.
Izinhlelo eziklanywe ngezakhi zekhwalithi ezinhlakeni ze-semiconductor
Indima yezakhi ezisezingeni nendlela yokwenza kahle ibalulekile ekulawulweni okuqondile kanye nokwenziwa okuphephile kwe-semiconductors. Izakhi ezisetshenzisiwe zidinga ukuqina nokuvuza kalula ukufanisa izimo zenqubo ezahlukahlukene ezidingekayo ezigabeni ezihlukile ze-COCTIVE.AFK's Valves ephezulu, ukufakwa, amabakaki okubopha abonakala ngezici ezilandelayo:
Ubumsulwa be-Ultra-High
Izimpawu ezingenayo ezivuzayo
Ukufakelwa okulawulwa kokushisa okulawulwayo
Ukulawulwa Kwengcindezelo
Ukumelana nokugqwala
Ukwelashwa nge-electrolytic polishic polishing
Isikhathi sePosi: Oct-09-2023