Imishini yokwelashwa igesi yomsila ingaphatha amagesi asetshenziswe ezinqubweni ze-etching kanye nezinqubo ze-semiconductor, i-th3, i-NF3, i-PH3, i-NH3, N2O, njalonjalo.
Ukuphelisa Indlela Yokwelashwa Kwegesi
Ngokwesici sokwelashwa kwegesi yokuphelelwa amandla, ukwelashwa kungahlukaniswa ngezinhlobo ezine zokwelashwa:
1. Uhlobo lokugeza lwamanzi (ukwelashwa kwamagesi alonakalisayo)
2. Uhlobo lwe-oxidizing (ukubhekana namagesi avuthayo futhi anobuthi)
I-3. I-Adsorption (Ngokusho kohlobo lwe-Adsorption Material ukubhekana negesi ehambisanayo yokuqeda).
Uhlobo lwe-4.Plasma lokuvutha (zonke izinhlobo zamagesi okuphelelwa amandla angalashwa).
Uhlobo ngalunye lokwelashwa lunezinzuzo zalo nobunzima kanye nobubanzi bawo bohlelo lokusebenza. Lapho indlela yokwelashwa iwukugeza amanzi, imishini ishibhile futhi ilula, futhi ingaphatha kuphela amagesi ancibilikisa amanzi; Uhla lwesicelo sohlobo lokugeza lwamanzi kagesi luphakeme kunalolo hlobo lokugeza lwamanzi, kepha izindleko zokuhlinzwa ziphezulu; Uhlobo owomile lunokusebenza kahle kokwelashwa okuhle, futhi alusebenzi ekuhambeni kwegesi okulula ukuvalwa noma ukugeleza.
Amakhemikhali nemikhiqizo yabo eyejwayelekile esetshenziswa embonini ye-semiconductor ingahlukaniswa ngezigaba ngokuya ngezakhiwo zazo zamakhemikhali kanye namabanga ahlukene:
1. Amagesi avuthayo afana ne-SIH4H2, njll.
2. Amagesi anobuthi anjenge-ASH3, PH3, njll.
3. Amagesi awonakalisayo anjenge-HF, HCL, njll.
4. Amagesi abamba ukushisa afana ne-CF4, NF3, njll.
Njengoba amagesi amane angenhla eyingozi emzimbeni noma emzimbeni womuntu, kufanele avikele ukumiswa kwawo ngqo emkhathini, ngakho-ke isitshalo se-semiconductor esijwayelekile sifakwa ohlelweni olukhulu lokuphehla igesi, futhi lolu hlelo lokusebenza lunqunyelwe ukuqeda amagesi ancibilikisiwe amanzi, futhi akwazi ukubhekana nokuhlukaniswa kwenqubo ye-semiconductor eshintshayo. Ngakho-ke, kuyadingeka ukuthi ukhethe futhi uhambisane nemishini yokwelashwa ehambisanayo yegesi ngokusho kwezimpawu zegesi ezisuselwa kwinqubo ngayinye ukuze uxazulule inkinga yegesi ephumayo ngendlela encane. Njengoba indawo yokusebenza iseduze kakhulu nohlelo lokuphelelwa yigesi oluphambili, imvamisa ngenxa yezimpawu zegesi iholela ekuqothulweni kwe-crystalline noma uthuli lwepayipi, okuholela ekuqhumeni kwepayipi, futhi kubangele ukuqhuma kokuphepha komsebenzi wabasebenzi. Ngakho-ke, endaweni yokusebenza kudinga ukulungiselela imishini yokwelashwa ephuma emishini emincane elungele izici ze-Process Gas, ukuze kuncishiswe igesi eqinile endaweni yomsebenzi, ukuqinisekisa ukuphepha kwabasebenzi.
Isikhathi sePosi: Aug-10-2023