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1 | Ingcindezi yokusebenza ephezulu 20.6 Mpa. |
2 | Ubukhulu.izinga lokushisa lokusebenza 204 ℃ (Indawo yokushisa ephezulu ifinyelela ku-454 ℃, ngalesi sikhathi impahla yokuvala ithathelwa indawo ngegraphite enwetshiwe) |
3 | Uhlelo lokuhlunga Izinto ezingcolisayo, amagesi, uketshezi ziyasebenza. |
4 | Insimbi engagqwali powder metallurgy sintered isihlungi ukunemba 2μm~40μm |
5 | Ukugeleza kwesihlungi 1x 10 -6~1×10-2L/min.cm2.pa |
6 | Isihlungi singashintshwa. |
Izici zomkhiqizo Zokuhlunga
1 | Ububanzi bohlelo lokusebenza olubanzi, ukugeleza kuyahlukahluka kusuka ku-15 kuye ku-300SL / min. |
2 | Inokuhambisana okuhle namagesi amaningi we-high-purity semiconductor process. |
3 | I-3 nanoparticle filtration capacity igcina ukusebenza kahle kokugeleza okuphezulu kanye nokwehla kwengcindezi enkulu kakhulu. |
4 | I-5Ra electropolished surface ingavimbela ukungcola kwangaphakathi. |
5 | Bhaka nge-nitrogen eshisayo ngemva kwamanzi e-deionized ukuze uhlangabezane nezindinganiso zenqubo ye-semiconductor. |
6 | 1000 izinga lokukhiqiza i-aseptic workshop engenalo uthuli, ukuhlanza kanye nendawo yokupakisha. |
7 | Hlola ukuvuza kwe-helium okungu-100%. |
Inlet | I-Outlet | |
1 | 1/8″ ukufaka ishubhu | 1/8″ ukufaka ishubhu |
2 | 1/4″ ukufaka ishubhu | 1/4″ ukufaka ishubhu |
3 | 3/8″ ukufaka ishubhu | 3/8″ ukufaka ishubhu |
4 | 1/2" ukufakwa kwe-tube | 1/2" ukufakwa kwe-tube |
5 | 6MM ukufakwa kweshubhu | 6MM ukufakwa kweshubhu |
6 | 8MM ukufakwa kweshubhu | 8MM ukufakwa kweshubhu |
7 | Ukufakwa kwe-tube engu-10MM | Ukufakwa kwe-tube engu-10MM |
8 | Ukufakwa kweshubhu engu-12MM | Ukufakwa kweshubhu engu-12MM |
9 | 1/8″ I-NPT Yabesifazane | 1/8″ I-NPT Yabesifazane |
10 | 1/4″ I-NPT Yabesifazane | 1/4″ I-NPT Yabesifazane |
11 | 1/4″ I-NPT yesilisa | 1/4″ I-NPT yesilisa |
12 | 3/8″ I-NPT Yabesilisa | 3/8″ I-NPT Yabesilisa |
13 | 1/2″ I-NPT yesilisa | 1/2″ I-NPT yesilisa |
Izinhlaka Zokusebenza Komkhiqizo Zokuhlunga
1 | Ukunemba Kokuhlunga | ≥0.0025μm | |
2 | Ukusebenza kahle kokuhlunga | Izinga lokususwa99.99999%≥0.0025μm | |
3 | Ukugeleza kukalwe | 15L/Miz | |
4 | 60L/Miz | ||
5 | 120L/Miz | ||
6 | 200L/Miz | ||
7 | 300L/Miz | ||
8 | Ukwakheka kwesihlungi | isici sokuhlunga | 316L/PTFE |
9 | izindlu | insimbi engagqwali 316L | |
10 | Izimo zokusebenza | Ukucindezela kokungena okuphezulu | 21Mpa (310kgf/cm2) |
11 | Ingcindezi ephezulu yokuhluka | 15Mpa (153kgf/cm2) | |
12 | Izinga lokushisa eliphezulu lokusebenza | 430 ℃ (igesi ye-inert) | |
13 | Izinga lokuvuza kwe-Helium | 1×10-9 atm.cc/sec | |
14 | Ukuqedwa kobuso | ≤Ra 5μin |